Tag Archive for: deposition

Publication on AWSensors technology

Nanoporous Metal–Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Authors: Jenna Multia, Dmitry E. Kravchenko, Víctor Rubio-Giménez, Anish Philip, Rob Ameloot, and Maarit Karppinen

Journal: ACS Appl. Nano Mater. (2023)



Atomic/molecular layer deposition (ALD/MLD) allows for the direct gas-phase synthesis of crystalline metal–organic framework (MOF) thin films. Here, we show for the first time using krypton and methanol physisorption measurements that ALD/MLD-fabricated copper 1,4-benzenedicarboxylate (Cu-BDC) ultrathin films possess accessible porosity matching that of the corresponding bulk MOF.


You may read the full paper here.

Publication on AWSensors technology

Aerosol Jet Printing of the Ultramicroporous Calcium Squarate Metal–Organic Framework

Authors: Dmitry E. Kravchenko, Aleksander Matavž, Víctor Rubio-Giménez, Hanne Vanduffel, Margot Verstreken, Rob Ameloot

JournalChem. Mater. (2022)



Efficient methods to deposit thin layers of metal–organic frameworks (MOFs) are needed to integrate these microporous materials into microelectronics, sensing devices, and membranes. Herein, we report for the first time the direct aerosol jet printing of a MOF material. The ultramicroporous MOF [Ca(C4O4) (H2O)] (UTSA-280) was deposited from an aqueous precursor solution. In addition to blanket coatings, aerosol jet printing provides direct access to patterned coatings with a resolution of 100 μm via a digital, maskless approach. Moreover, by enabling spatial control over the layer thickness via the number of passes of the nozzle, this direct-write approach presents a more accessible alternative to advanced patterning techniques such as grayscale lithography.


You may read the full paper here.

pH Controlled Electrochemical Deposition of Polyelectrolyte Complex Films

Authors: Kazi Sadman, Qifeng Wang, Shawn H Chen, David Efim Delgado and Kenneth R Shull. Northwestern University, Evanston, Illinois, US

Journal:  Langmuir 2017, 33(8) 1834-1844.

Abstract: Polyelectrolyte complex (PEC) films made from oppositely charged polymer chains have applications as drug delivery vehicles, separation membranes, and biocompatible coatings. Conventional layer-by-layer (LbL) techniques for polyelectrolyte coatings are low-throughput and multistep processes that are quite slow for building films on the order of micrometers. In this work, PEC films are electrochemically deposited using a rapid one-pot method yielding thick (1 μm) films within short experimental time scales (5 min). This rapid electrodeposition is achieved by exploiting the reduction of hydrogen peroxide at mild electrode potentials that avoid water electrolysis, yet trigger the pH responsive self-assembly of a PEC film composed of poly(acrylic) acid and poly (allylamine) HCl. In-situ rheology using an electrochemical quartz crystal microbalance (EQCM) quantified the shear modulus-density product of the deposited layer to be on the order of 107 Pa-g/cm3 at a frequency of 15 MHz, with a viscoelastic phase angle at this frequency of approximately 50. This electrodeposition scheme furthers the development of PEC coatings for more high-throughput applications where a fast and efficient single step approach would be desirable for obtaining coatings.

Link: https://doi.org/10.1021/acs.langmuir.6b04491